华体会官方网页版-华体会(中国):3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moire Depth Sectioning Method
Author(s): Wen, HH (Wen, Huihui); Zhang, HY (Zhang, Hongye); Peng, RL (Peng, Runlai); Liu, C (Liu, Chao); Liu, SM (Liu, Shuman); Liu, FQ (Liu, Fengqi); Xie, HM (Xie, Huimin); Liu, ZW (Liu, Zhanwei)
Source: SMALL METHODS DOI: 10.1002/smtd.202300107 Early Access Date: JUN 2023
Abstract: The mechanical properties of micro- and nanoscale materials directly determine the reliability of heterostructures, microstructures, and microdevices. Therefore, an accurate evaluation of the 3D strain field at the nanoscale is important. In this study, a scanning transmission electron microscopy (STEM) moire depth sectioning method is proposed. By optimizing the scanning parameters of electron probes at different depths of the material, the sequence STEM moire fringes (STEM-MFs) with a large field of view, which can be hundreds of nanometers obtained. Then, the 3D STEM moire information constructed. To some extent, multi-scale 3D strain field measurements from nanometer to the submicrometer scale actualized. The 3D strain field near the heterostructure interface and single dislocation accurately measured by the developed method.
Accession Number: WOS:001003319600001
PubMed ID: 37300326
Author Identifiers:
Author Web of Science ResearcherID ORCID Number
Runlai, Peng 0000-0003-3057-4040
ISSN: 2366-9608
